Chemical Delivery System
Xplaim-ST-CDS
Equipment Overview
Primarily used for the supply of various chemical solutions in the semiconductor wet process industry.
Diverse Model Range
Supports both facility-centralized CDS and equipment-local CDS; capable of supplying concentrated solutions with optional dilution and mixing systems.
Customizable Configuration
Standard dual-drum, dual-pump, dual-filtration with automatic switching. Customizable VMB configurations (1-to-4 to 1-to-8) for flexible setup.
High Reliability
Multiple digital instruments for monitoring system parameters including conductivity, pH, temperature, pressure, flow rate, and empty drum detection.
Fire Safety
Organic chemical supply systems constructed with stainless steel materials and standard automatic fire extinguishers.