江蘇芯夢半導(dǎo)體設(shè)備有限公司

  • 地址：江蘇省蘇州市吳中經(jīng)濟(jì)開發(fā)區(qū)東吳南路25號城南科技產(chǎn)業(yè)園7幢（2號廠房）

  • 電話：0512-67296032

  • 傳真：0512-67296032

  • 企業(yè)郵箱：sales@js-xm.com.cn

合作熱線

  • 戰(zhàn)略合作：fuxing.wang@js-xm.com.cn

  • 技術(shù)交流：louis.shao@js-xm.com.cn

  • 供應(yīng)鏈合作：sunshine@js-xm.com.cn

Single Wafer Cleaning Equipment

Automatic Stripper

Xtrim-SC-ST300

Equipment Overview

Load Port *4、Multi Chambers、Robot、CDU、e-Flow

Complete Function

  • Basic configurations such as Nano-Spray, Mega-Sonic, heating, N2 bubbling, and atmospheric/high-pressure DIW (Deionized Water) are optional

  • Corresponding chemical solutions can be matched according to customers' needs, such as NMP (N-Methyl-2-pyrrolidone), NaOH (Sodium hydroxide), IPA (Isopropyl alcohol), etc.

Chemical Savings

  • Equipped with professional systems for chemical solution recycling, automatic liquid replenishment, temperature control of the chemical solution, as well as air exhaust and waste discharge

  • Supports  switching recipes by the number of wafers or time, which can fully extend the service life of the chemical solutions

Pollution Control

  • Professional materials are selected to achieve efficient control of particles

  • The enclosed wafer processing environment effectively prevents the atomization of chemical liquids and particulate contamination

Customizable

  • Supports 6-inch, 8-inch, and 12-inch wafers
    Customized configurations can be made according to customers' requirements