江蘇芯夢半導體設備有限公司

  • 地址：江蘇省蘇州市吳中經(jīng)濟開發(fā)區(qū)東吳南路25號城南科技產(chǎn)業(yè)園7幢（2號廠房）

  • 電話：0512-67296032

  • 傳真：0512-67296032

  • 企業(yè)郵箱：sales@js-xm.com.cn

合作熱線

  • 戰(zhàn)略合作：fuxing.wang@js-xm.com.cn

  • 技術交流：louis.shao@js-xm.com.cn

  • 供應鏈合作：sunshine@js-xm.com.cn

Single Wafer Cleaning Equipment

Automatic Single Wafer Cleaner

Xtrim-SC-CL300

Equipment Overview

Loadport*4、Multi Chambers、Robot、CDU、e-Flow

Comprehensive Functions

  • Optional basic configurations: Nano-Spray、Brush Clean、Mega-Sonic、DIW、N2

  • Compatible with corresponding chemicals based on your needs

Chemical Savings

  • Supports chemical recycling

  • Compatible with various chemicals

  • Allows recipe switching based on wafer quantity and processing time

Standard Modules

  • Consists of standardized modules, and JSXM has extensive assembly experience

  • Compact equipment structure saves space

Automation

  • Automated robot loading and unloading and mapping

  • Enables continuous automated process handling